Effect of Thermocapillary Flow on the Surface Profile in Pulsed Laser Micro Polishing

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Date
2013-03-25Author
Ma, Chao
Vadali, Madhu
Duffie, Neil A.
Pfefferkorn, Frank E.
Li, Xiaochun
Publisher
8th International Conference on MicroManufacturing (ICOMM 2013)
Metadata
Show full item recordAbstract
The objective of this paper is to understand and predict how surface profiles produced by thermocapillary flow change with material properties and process parameters during
pulsed laser micro polishing. Thermocapillary flow is driven by surface tension gradient which is induced by temperature
gradient in a melt pool. Experimental work has
shown that great reductions in surface roughness can be achieved by manipulating thermocapillary flow (thermocapillary regime). The existing surface prediction model only works for pulsed laser micro polishing through damping of stationary capillary waves (capillary regime) where thermocapillary flow is negligible.
It is desirable to develop a predictive capability for the thermocapillary regime to offer guidance for parameter selection and optimization. Analytical heat transfer and fluid flow models are derived for laser induced thermocapillary flow. A dimensionless number, normalized average displacement (NAD) of a liquid particle during thermocapillary flow, is proposed and calculated directly from material properties and laser process parameters. NAD is found to be strongly correlated with the surface profile introduced by
thermocapillary flow and successfully used to predict polishing achievable in thermocapillary regime. Combining this model with the existing surface prediction model will enable prediction over a wide range of parameters.
Subject
Polishing
Micro
Modeling
Pulse Laser
Laser
Marangoni Flow
Permanent Link
http://digital.library.wisc.edu/1793/65188Type
Conference Paper
Citation
ICOMM 2013 No. 36
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