Browsing International Conference on MicroManufacturing (ICOMM) by Author "Qu, Weilin"

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A Thin-Film Heat Flux Sensor Fabricated on Copper for Heat Transfer Measurements in Parallel Channel Heat Sinks

Jasperson, Benjamin A.; Pfefferkorn, Frank E.; Qu, Weilin; Turner, Kevin T. (5th International Conference on MicroManufacturing (ICOMM 2010), 2010-05-05)

A combination of lithography-based microfabrication and micro end milling is used to manufacture thin-film resistance temperature detector (RTD) heat flux sensors on bulk copper substrates. The fabrication process uses ...