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    • Hybridizing Micromachining and Microfabrication for Sensor Chips 

      Moghimian, Nima; Etrati, Ali; Sam, Mahshid; Bhiladvala, Rustom (8th International Conference on MicroManufacturing (ICOMM 2013), 2013-03-25)
      We present an example of packaging a MEMS sensor for measuring fluctuations of the wall shear stress in turbulent fluid flows. For these sensors, topographical and thermal constraints required the development of a hybrid ...