Browsing International Conference on MicroManufacturing (ICOMM) by Author "Bhiladvala, Rustom"
Now showing items 1-1 of 1
-
Hybridizing Micromachining and Microfabrication for Sensor Chips
Moghimian, Nima; Etrati, Ali; Sam, Mahshid; Bhiladvala, Rustom (8th International Conference on MicroManufacturing (ICOMM 2013), 2013-03-25)We present an example of packaging a MEMS sensor for measuring fluctuations of the wall shear stress in turbulent fluid flows. For these sensors, topographical and thermal constraints required the development of a hybrid ...