Browsing International Conference on MicroManufacturing (ICOMM) by Author "Arnal, Benoit"
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Towards CNC automation in AFM probe-based nano machining
Brousseau, Emmanuel; Arnal, Benoit; Thiery, Stephane; Nyiri, Eric; Gibaru, Olivier; Mayor, J. Rhett (8th International Conference on MicroManufacturing (ICOMM 2013), 2013-03-25)This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, ...