Browsing Theses--Electrical Engineering by Author "Wendt, Amy"

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Ion energy distributions for collisional ion sheaths at an rf-biased plasma electrode

Qin, Xueying victor (2010-05-15)

In plasma etching for materials processing, ions are often accelerated towards the substrate via a sheath electric field generated by a bias voltage applied to the substrate electrode. By applying at tailored bias waveform ...
Optical emission study of ion composition in an inductively coupled oxygen plasma

Ly, Nathaniel (2015-08-21)

The success of ion implantation to precisely modify substrate properties is dependent on controlling the incident ion energies to achieve the desired depth of the implanted ions. Oxygen plasmas generally contain both O+ ...