Gridless ionized metal flux fraction measurement tool for use in ionized physical vapor deposition studies

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Date
1999Author
Snodgrass, Thomas G.
Booske, John H.
Wang, Weitung
Wendt, Amy E.
Shohet, J. Leon
Publisher
American Institute of Physics Inc
Metadata
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http://digital.library.wisc.edu/1793/10380Description
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Citation
The following article appeared in Snodgrass, T.G., Booske, J.H., Wang, W., Wendt, A.E., & Shohet, J.L. (1999). Gridless Ionized Metal Flux Fraction Measurement Tool For Use In Ionized Physical Vapor Deposition Studies. Review Of Scientific Instruments, 70(2), 1525-1529. and may be found at http://link.aip.org/link/?rsi/70/1525